Non-destructive resonant frequency measurement on MEMS actuators

Resonant frequency measurements provide useful insight into the repeatability of microelectromechanical systems (MEMS) manufacturing processes. Several techniques are available for making this measurement. All of these techniques however, tend to be destructive to devices which experience sliding friction, since they require the device to be operated at resonance. A nondestructive technique is presented which does not require the device to be continually driven at resonance. This technique was demonstrated on a variety of MEMS actuators.