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ERRATUM: SiGe CMOS fabrication using SiGe MBE and anodic/LTO gate oxide
ERRATUM: SiGe CMOS fabrication using SiGe MBE and anodic/LTO gate oxide
2000
Roslina Mohd Sidek
U N Straube
A.M. Waite
A G R Evans
C. P. Parry
P. Jonathon Phillips
T. E. Whall
E. H. C. Parker
Keywords:
Gate oxide
Analytical chemistry
Anode
CMOS
Chemistry
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