Diamond nanowire array and preparation method thereof, and electrode for electrochemical analysis

The invention discloses a diamond nanowire array and a preparation method thereof, and an electrode for electrochemical analysis. The preparation method comprises the steps: a mask layer is arranged on the surface of a diamond thin film, and a graph of the mask layer is formed by covering top ends of all to-be-formed diamond nanowires and exposing to-be-etched parts between adjacent diamond nanowires; an ICP-RIE etching process is adopted for etching the diamond thin film having the mask layer so as to remove the to-be-etched parts, and the columnar diamond nanowires are formed in the diamond thin film; and a material of the mask layer located on the top end of each diamond nanowire is removed. The ICP-RIE etching is adopted; due to increase of electrical inductive coupling elements having high plasma density and etching efficiency, the plasma generation and acceleration can be respectively controlled, the etching process and morphology controllability can be realized, and the diamond nanowire array having better side wall steep property and higher deep-wide ratio is obtained.