Bulk type high temperature source
2012
The present invention relates to a high capacity high temperature evaporation source, with a crucible, a linear conduit line and a nozzle, all made of the same materials of: tungsten which does not react with copper, ceramic, quartz, and graphite or molybdenum, in order to have no difference in the thermal expansion coefficient. The crucible and a heater for the nozzle are made of tungsten so as to have little gas leakage, and be durable against high temperatures. The nozzle formed on the linear conduit line are not built in all-in-one style but in a self-assembly style, enabled to be replaced with nozzles of variable diameters after being tested of the evaporation rate.
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