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Measurement of Pitch and Width Samples with the NIST Calibrated Atomic Force Microscope | NIST
Measurement of Pitch and Width Samples with the NIST Calibrated Atomic Force Microscope | NIST
1998
Ronald G. Dixson
R Koning
Theodore V. Vorburger
Joseph Fu
V W. Tsai
Keywords:
NIST
Metrology
Analytical chemistry
Atomic force microscopy
Laser linewidth
Materials science
Optics
Correction
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