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Physical vapour thin film deposition techniques
Physical vapour thin film deposition techniques
2003
H.C. Freyhardt
R Wrdenweber
B. Utz
Alexander Usoskin
Y Yamada
Keywords:
Electrostatic spray-assisted vapour deposition
Thin film
Metalorganic vapour phase epitaxy
Combustion chemical vapor deposition
Layer by layer
Physical vapor deposition
Pulsed laser deposition
Materials science
Inorganic chemistry
Chemical engineering
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