Fabrication of voltage-driven magneto-optical spatial light modulator

Aerosol deposition method (ADM) was adopted to fabricate the piezoelectric PZT film without the high temperature annealing process to reduce the damage of the Bi:YlG layer. The voltage-driven magneto-optic spatial light modulator (MOSLM) was fabricated on flat-surface Bi:YIG film including pixel structure by site-selected epitaxial method. Finite element method was used to investigated efficiency of the structure. PZT film was used to stress the magneto-optical Bi:YIG film to switch the magnetization direction of the film.