Old Web
English
Sign In
Acemap
>
Paper
>
Effects of carbon on dynamic annealing and on electrical activation of dopants in silicon substrate
Effects of carbon on dynamic annealing and on electrical activation of dopants in silicon substrate
1994
Joel Pereira de Souza
H. Boudinov
Paulo Fernando Papaleo Fichtner
Keywords:
Substrate (chemistry)
Carbon
Annealing (metallurgy)
Dopant
Inorganic chemistry
Mineralogy
Silicon
Materials science
Chemical engineering
dynamic annealing
Correction
Source
Cite
Save
Machine Reading By IdeaReader
0
References
3
Citations
NaN
KQI
[]