pressure sensor has deformable diaphragm
1987
This invention relates to pressure sensors. It relates to a sensor comprising a rigid support 10 and a diaphragm 20 whose peripheral portion is fixed to the support 10 by an adhesive layer 30. The central portion of the diaphragm carries a resistor R thick layer acting a piezoresistive transducer. The diaphragm 20 can elastically deform toward the support 10 when pressure is applied thereto. According to the invention, the adhesive layer 30 has a thickness equal to the deflection distance of the center of the diaphragm to the upper limit of the pressure range provided. Application to pressure sensors. (CF DRAWING IN BOPI)
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