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Development of Directed Self-Assembly Materials for Sub 10 nm Patterning
Development of Directed Self-Assembly Materials for Sub 10 nm Patterning
2014
Hiroyuki Komatsu
Masafumi Hori
Shinya Minegishi
Takehiko Naruoka
Tomoki Nagai
Keywords:
Organic chemistry
Self-assembly
Anionic addition polymerization
Copolymer
Materials science
directed self assembly
Correction
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