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Crystalline quality of n-type 4H-SiC off-axis substrate by solution growth technique
Crystalline quality of n-type 4H-SiC off-axis substrate by solution growth technique
2017
Kazuhiko Kusunoki
Kazuaki Seki
Yutaka Kishida
Hiroshi Kaido
Koji Moriguchi
Hironori Daikoku
Motohisa Kado
Masayoshi Doi
Katsunori Danno
Akinori Seki
Takayuki Shirai
Hiroaki Saito
Takeshi Bessho
Keywords:
Crystallography
Substrate (chemistry)
Crystal
Materials science
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