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Suspended-ultrathin Si membrane on SOI: a novel structure to reduce thermal stress of GaN epilayer
Suspended-ultrathin Si membrane on SOI: a novel structure to reduce thermal stress of GaN epilayer
2020
Yuzi Song
Kejia Wang
Pengwei Du
Zhiyuan Cheng
Keywords:
Optoelectronics
Membrane
Stress (mechanics)
Silicon on insulator
Materials science
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