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Accurate Dimensional Metrology With Atomic Force Microscopy | NIST
Accurate Dimensional Metrology With Atomic Force Microscopy | NIST
2000
Ronald G. Dixson
R Koning
Joseph Fu
Theodore V. Vorburger
Thomas B. Renegar
Keywords:
NIST
Dimensional metrology
Metrology
Laser linewidth
Nanotube
Analytical chemistry
Materials science
Atomic force microscopy
step height
Optics
Correction
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