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Fabrication and evaluation of MEMS optical interferometric biosensor with high wavelength selectivity
Fabrication and evaluation of MEMS optical interferometric biosensor with high wavelength selectivity
2017
Takahashi Toshiaki
Hizawa Takeshi
Misawa Nobuo
Taki Miki
Sawada Kazuaki
Takahashi Kazuhiro
Keywords:
Fabry–Pérot interferometer
Selectivity
Interferometry
Microelectromechanical systems
Optoelectronics
Wavelength
Fabrication
Biosensor
Materials science
wavelength selectivity
Correction
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