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A nitriding process of very thin molybdenum films in an expanding microwave plasma at low temperature
A nitriding process of very thin molybdenum films in an expanding microwave plasma at low temperature
2010
Said Touimi
I. Jauberteau
Sylvain Weber
Annie Bessaudou
Armand Passelergue
R Mayer
J. L. Jauberteau
J. Aubreton
Keywords:
Metallurgy
Composite material
Materials science
Nitriding
Molybdenum
Ion source
Correction
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