Design of a Novel Vector Hydrophone Based on MEMS

In view of the urgent demand of high sensitivity,mall volume and inexpensive vector hydrophone in domestic,a novel double T-shaped vector hydrophone is proposed.The structure can be integrated fabricated,which is suit for lot manufacturing and multiple arrays.This paper simulated the novel structure by ANSYS.It could be concluded that resonance frequency was 1 840 Hz and the position of the piezo-resistor was away from edges about 180 m.The prototype of the vector hydrophone was fabricated and preliminary characterization tests of the hydrophone were performed.Results showed that the sensitivity was-175 dB at 1 kHz and frequency response ranged from 100 Hz to 4 kHz,possessing satisfactory directional pattern in the form of "8" shape.