A Fabrication Method of Nano-Metal Array for LSPR Sensor

An approach for self-assembling nanosphere material in the micro section formed by photolithography was proposed. An anchor template with micro-frame array was fabricated through photolithography, then a single layer of separate polystyrene nanospheres was aligned in the micro-frame; After a single layer of metal was deposited on the top of the assembled structures and the lift-off was taken, the nano-metal array with the hexagon shape was achieved. The optical properties of the nano-metal array structure was measured, and a sharp spectrum curve shows the absorption caused by plasma resonance of the nano-structure. The SEM and extinction of nano-mental array structure were given.