Curable material under the protection of high-energy radiation effect and method of use
1978
The invention relates to a curable protective material under the high-energy radiation effect and its method of use. This material comprises as a main component, a polymer soluble in a solvent containing ethylenically unsaturated double bonds, said polymer being obtained by reacting a polymer containing two or more oxirane rings and b containing monomer i at least one double bond with ethylenic unsaturation and ii a functional group capable of opening the oxirane rings and then opening the oxirane rings unreacted. Application of the material in integrated circuit fabrication methods.
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