Method for forming a film on a substrate by vapor phase decomposition

THE INVENTION CONCERNS A PROCESS FOR FORMING A FILM BY TESTIMONY ON SUBSTRATE. THE PROCESS IS INTRODUCING A SEPARATE PRECURSOR OR ACTIVATED SPECIES, FORMS IN BREAKDOWN OF SPACE B, AND ACTIVATED SPECIES FORMED IN AN AREA OF BREAKDOWN C IN BREAKDOWN OF SPACE OR THE FILM FORMED ON SUBSTRATE 101 SCOPE. ELEMENTS IMAGE FORMING MACHINE ELECTROPHOTOGRAPHIC COPIES, ETC.