Wide-range pressure control system and method applied to vacuum equipment

The invention relates to the technical field of vacuum, in particular to a wide-range vacuum pressure control system and method with an automatic pressure regulation function. A vacuum gauge is connected with a vacuum chamber and collects a vacuum degree signal of the vacuum chamber; a regulation valve control system is connected with the vacuum gauge, collects the vacuum degree signal and regulates vacuum degree of the vacuum chamber; one end of a vacuum regulation system is connected with the vacuum gauge, collects the vacuum degree signal and regulates the vacuum degree of the vacuum chamber; a mass flowmeter is connected with the vacuum chamber and used for filling the vacuum chamber with gas. The automatic regulation function is realized, during operation, the vacuum chamber is filled with the gas, when the temperature in the vacuum chamber is changed, the vacuum degree can be regulated automatically according to requirements of customers, and the wanted vacuum degree is reached.