Low-temperature chemical bath deposition of crystalline ZnO

Abstract ZnO crystals can be grown from alkaline aqueous solution not only by the standard hydrothermal technique at temperatures between 350 °C and 400 °C, but also by chemical bath deposition (CBD) at temperatures below 100 °C. In the presence of ZnO and ScAlMgO 4 (SCAM) substrates almost all ZnO deposits on the substrate, with different habits, however. Under optimized conditions even homoepitaxial layers can be obtained, while rod-like structures are obtained on SCAM substrates. The chemistry and the driving forces behind the two processes are considered in detail and the temperature dependence of the solution composition has been calculated. The driving force for the ZnO crystal growth in the standard hydrothermal technique is the difference in the ZnO solubility in alkaline solutions at different temperatures. In contrast, the driving force for the chemical bath deposition of ZnO at low temperatures is the decay of zinc ion complex molecules with increasing temperature.