Highpoweramplification ofsolid-state Nd:YAGlaser withshort pulses of300ps/5kHz

A double passdiode-pumped Nd:YAGrodlaser pre-amplifier forEUVlithography has beendemonstrated. An average output powerasgreat as81Wwithexcellent beamquality is available forinjection pulse duration of300ps. ©02005 Optical Society ofAmerica OCIScodes: (140.3280) Laser amplifiers; (140.6810) Thermal effects