Silicon mirrors and micromirror arrays for spatial laser beam modulation

This paper deals with design, technology and experimental investigations of mirrors and micromirror arrays made of monocrystalline silicon. Electrostatically operated twin-directional deflecting mirrors and mirror arrays convenient for continuous scanning with working frequencies between several 100 Hz up to 20 kHz will be presented. An experimental data based method to improve the accuracy of model parameters for simulations and to determine the cross coupling between array cells is new in the field of micromechanics and will be shown.