Viscous Flow of ZnF2- and Si3N4-Containing Borosilicate Glasses and Their Applications to MOS Capacitors

Abstract The characteristics of MOS capacitors passivated by ZnF 2 - and Si 3 N 4 -containing ZnO–B 2 O 3 –SiO 2 –A1 2 O 3 –P 2 O 5 glasses with a variation in water content were investigated. When the OH − absorption coefficients in the glasses increased, there was an adverse effect on the recovery of hysteresis and C–V curve shifts for the MOS capacitors passivated with them. Water content was related to the nitride concentrations in the ZnO–B 2 O 3 –SiO 2 –A1 2 O 3 –P 2 O 5 glasses. Because nitrite ions in glasses exhibited a pyrohydrolysis reaction, they played an important role in decreasing the concentration of OH − ions. A low OH − concentration in the glasses is useful in improving the C–V curves.