Phase synchronization of micromirror arrays using elastic linkages

This work analyzes to synchronize the phases of micromirror array and operate resonance frequency. The eigenvector, which synchronizes in-phase, can be found via a mass- damping-spring system. The device replaces conventional large area mirror, thus enhancing the working frequency and allowing micromirror arrays to reduce a smaller gap. The torsional micromirror array fabricates using three conventional masks based on bulk-micromachining technology. This work also describes the proposed design in detail. According to our result, the difference between the testing results and theoretical value is within 1 degree.© (2000) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.