Properties of AlN-TiB 2 -TiSi 2 coating system obtained by magnetron sputterring

The coatings investigated in this paper were deposited via the magnetron sputtering of AlN-TiB 2 -TiSi 2 target in Ar atmosphere. The investigation of structural-phase composition, element composition, morphology and mechanical properties before and after annealing up to 1350 °C was carried out. The concentration of elements in the coating were changed after annealing under 900°C and further annealing under 1350 °C (especially after annealing under 1350°C).The hardness of as-deposited coatings was 15 GPa, but after the annealing under 1350 °C the value of hardness was increased up to (22...23.5) GPa. The value of a viscoplasticity index was 0.07. All this provides high damping properties of the coating, and the amorphous-like structure makes promising the use of these coatings as diffusion barriers in the form of independent elements, and as a contacting layer in multilayer wear resistant coatings.