Indium tin oxide contacts to gallium nitride optoelectronic devices

We have fabricated GaN-based light-emitting diodes using transparent indium tin oxide (ITO) p contacts. ITO-contacted devices required an additional 2 V to drive 10 mA, as compared to similar devices with metal contacts. However, ITO has lower optical absorption at 420 nm (α=664 cm−1) than commonly used thin metal films (α=3×105 cm−1). Uniform luminescence was observed in ITO-contacted devices, indicating effective hole injection and current spreading.