Manufacturing method of silicon-based thin-film laminated solar battery

The invention discloses a manufacturing method of a silicon-based thin-film laminated solar battery, and the method is characterized in that an electrically-conductive nanometer silicon-oxide or silicon-carbide thin film is introduced into n layers of a bottom battery of a single-junction or multi-junction p/i/n-type silicon-based thin-film solar battery to form an n-type doped layer of a multilayer composite thin film, and silicon and silicon-oxide (SiOx) or silicon carbide (SiCx) doping, crystalline fraction, thickness, refraction index and electric conductivity in the n layers are adjusted and optimized simultaneously. According to the novel n-layer composite structure, the back reflection is increased and the n-layer optical absorption of the doped layer is reduced, so that the photoelectric conversion efficiency of the silicon thin-film laminated solar battery can be effectively increased.