Old Web
English
Sign In
Acemap
>
Paper
>
Preparation of Diamond-like Carbon Films on Top and Bottom Plates by RF-PECVD
Preparation of Diamond-like Carbon Films on Top and Bottom Plates by RF-PECVD
2021
xiongwenwen
Song He
Songsheng Zheng
Qijin Cheng
Hongxun Shen
Chao Chen
Wenwen Xiong
Song He
Songsheng Zheng
Qijin Cheng
Hongxun Sheng
Chao Chen
Keywords:
Materials science
Optoelectronics
Diamond-like carbon
Plasma-enhanced chemical vapor deposition
Correction
Source
Cite
Save
Machine Reading By IdeaReader
0
References
0
Citations
NaN
KQI
[]