Spectral imaging micro sensor

The invention belongs to the technical field of spectral analysis, and particularly relates to a spectral imaging micro sensor. The sensor is formed by combining an array structure of a micro-nano optical filtering and light splitting device and an image sensor or is processed by an integrated single chip in an integrated manner. Compared with the prior art, the invention provides a spectral image sensor structure integrated by a Fabry-Perot cavity and a CMOS image sensor in a monolithic manner based on a Fabry-Perot cavity spectral filtering principle, and a micro photoelectric image sensor with specific spectral filtering and light splitting characteristics is formed. The spectral imaging micro sensor realizes spectral filtering and light splitting for each point light beam on an incident light plane by using the core structure design of a micro filtering and light splitting device array, and reads intensity information of each spectrum through an integrated photoelectric sensor array. The core device realizes modulation for spectral light splitting characteristics by the structural design of photoelectric integration, discrete optical devices are reduced, a mechanically-driven modulation device is not required, the system volume is reduced, and the energy consumption and the cost of the system are reduced.