Tunable, low loss Ba0.6Sr0.4TiO3/Bi1.5Mg1.0Nb1.5O7/Ba0.6Sr0.4TiO3 multilayer thin films prepared by pulsed laser deposition

Ba0.6Sr0.4TiO3/Bi1.5Mg1.0Nb1.5O7/Ba0.6Sr0.4TiO3 (BST/BMN/BST) multilayer thin films and Ba0.6Sr0.4TiO3 (BST) thin films were fabricated on Pt/Ti/SiO2/Si (1 0 0) substrates by pulsed laser deposition. The multilayer thin films show a dielectric constant of 314 and dielectric loss tangent of 0.006 at frequency of 0.1 MHz. The BST/BMN/BST multilayer thin films had a ~26.7 % relative tunability of dielectric constant at a maximum applied dc bias field of 357 kV/cm, while the figure of merit is 45.5. No obvious hysteresis behavior was observed in the BST/BMN/BST multilayer thin films. The excellent dielectric constant and tunability, low dielectric loss tangent suggest that BST/BMN/BST multilayer thin films have giant potential application for tunable microwave device.