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Evaluation of Ultratrace Metallic Elements in Poly-SiGe Thin Films
Evaluation of Ultratrace Metallic Elements in Poly-SiGe Thin Films
2003
Yuji Yamada
Shoji Kozuka
Ayako Shimazaki
Miyuki Takenaka
Keywords:
Thin film
Composite material
Metallurgy
Metal
Materials science
Inductively coupled plasma mass spectrometry
Correction
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