Formation of clusters through generation of free atoms

We consider, from a general point of view, conversion of a supersaturated vapour of metal atoms located in a buffer gas into metal clusters. A simplified set of balance equations for the size distribution function of clusters allows us to describe the time evolution of its parameters for various methods of cluster generation, such as the laser method, evaporation of metal atoms from a heated metallic surface, and the magnetron method of cluster generation by cathode erosion. Parameters of the distribution function together with certain peculiarities of cluster growth can be used for the analysis of certain methods of cluster generation under given external conditions. We illustrate this on the analysis of generation of titanium clusters in magnetron discharge where metal atoms from the cathode are captured by a buffer gas flow and are transformed there into clusters. The buffer gas together with metal clusters passes through an orifice, so that clusters can attach to a substrate. The analysis of this method allows us to find optimal parameters of this process.