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Laser probing determination of the thermal conductivity of integrated circuit dielectric layers
Laser probing determination of the thermal conductivity of integrated circuit dielectric layers
1997
Tam Phan
Stefan Dilhaire
Jean-Christophe Batsale
V. Quintard
W. Claeys
Keywords:
Thermodynamics
Dielectric
Optoelectronics
Laser
Temperature measurement
Integrated circuit
Test method
Thermal conductivity
Heat transfer
Optics
Chemistry
Interconnection
laser probing
Correction
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