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Correction to "Real-Time Carbon Content Control for PECVD ZrO $_2$ Thin-Film Growth"
Correction to "Real-Time Carbon Content Control for PECVD ZrO $_2$ Thin-Film Growth"
2004
D. Ni
Y Lou
Panagiotis D. Christofides
L. Sha
S. Lao
J.P. Chang
Keywords:
Electronic engineering
Thin film
Materials science
Plasma-enhanced chemical vapor deposition
Carbon
Carbon film
semiconductor thin films
Process control
Transistor
Correction
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