Technology for YBaaCus07 SNS- and SIS-Josephson

Ramp-edge Josephson junctions from the high-temperature superconductor YBa2CusO.r re- quire a multilayer preparation process. In order to increase the reproducability of the junction character- istics we investigate the subprocesses using statistical methods for the design of experiments. The optimiza- tion of the process parameters enables us to prepare ramp-edge Josephson junctions with PrBa2 Cus07 as barrier material which exhibit tighter barriers. Adapting the growth conditions for YBazCusO7 on MgO films we prepared Josephson junctions with a 10 nm MgO barrier.