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Development of Poly-Si Formation Method on Glass Substrate by Using Hydrogen Radical Heating
Development of Poly-Si Formation Method on Glass Substrate by Using Hydrogen Radical Heating
2019
Hiroki Nakaie
Shingo Saito
Tetsuji Arai
Kazuki Kamimura
Keisuke Arimoto
Kousuke Hara
Junji Yamanaka
Kiyokazu Nakagawa
Toshiyuki Takamatsu
Kentarou Sawano
Keywords:
Hydrogen
Substrate (chemistry)
Chemical engineering
Materials science
hydrogen radical
Photochemistry
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