Ultra-compact absolute pressure sensor based on mechanical amplification coupled to a suspended piezoresistive nanogauge

Numerous pressure sensors have been developed over the last 4 decades using piezoelectric, capacitive or piezoresistive detection. Most of them are based on a direct readout of a membrane deformation, whose area is in the order of 1 mm 2 . In this paper, we demonstrate for the first time the concept of an ultra-compact (0.04mm 2 ) absolute pressure sensor based on suspended nano-gauges with mechanical amplification and embedded self-test.