Reduced basis method for the electromagnetic scattering problem: a case study for FinFETs

Optical 3D simulations in many-query and real-time contexts require new solution strategies. We study an adaptive, error controlled reduced basis method for solving parameterized time-harmonic optical scattering problems. Application fields are, among others, design and optimization problems of nano-optical devices as well as inverse problems for parameter reconstructions occurring e. g. in optical metrology. The reduced basis method presented here relies on a finite element modeling of the scattering problem with parameterization of materials, geometries and sources.