In-situ Activation of an Indium(III) Triazenide Precursor for Epitaxial Growth of Indium Nitride by Atomic Layer Deposition

Nathan J. O’Brien,Polla Rouf,Rouzbeh Samii,Karl Rönnby,Sydney C. Buttera,Chih-Wei Hsu,Ivan Gueorguiev Ivanov,Vadim G. Kessler,Lars Ojamäe,Henrik Pedersen

In-situ Activation of an Indium(III) Triazenide Precursor for Epitaxial Growth of Indium Nitride by Atomic Layer Deposition

2020

Nathan J. O’Brien
Polla Rouf
Rouzbeh Samii
Karl Rönnby
Sydney C. Buttera
Chih-Wei Hsu
Ivan Gueorguiev Ivanov
Vadim G. Kessler
Lars Ojamäe
Henrik Pedersen

Indium nitride (InN) is characterized by its high electron mobility making it a ground-breaking material for high frequency electronics. The difficulty of depositing high-quality crystalline InN cu...

Keywords:

Epitaxy
Indium
Atomic layer deposition
Materials science
In situ
Indium nitride
Inorganic chemistry
high electron
Crystal

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