Studying heating of magnetron target based on measurement of substrate temperature

Abstract The present work aims to develop the method for indirect determination of the magnetron target temperature. This method is based on the measurements of heating kinetic curves of the thermocouple sensor's sensing element. The measurements were performed during operation of the magnetrons with cold and hot titanium targets. In order to calculate the hot target temperature, a transcendental equation was derived using the Stefan-Boltzmann law and the Hertz-Knudsen equation. In the general case, the equation uses the difference of the fluxes transferred to the sensing element. The study revealed that in the target temperature range of 1000–1500 °C, the influence of the heat flux transferred by the evaporated atoms of the titanium target on the substrate temperature can be neglected. And the heat fluxes caused by the gas discharge with a current density in the range of 50–100 mA/cm 2 have a significant influence on the substrate temperature.