Upper layer film forming composition, pattern forming method, resist pattern, and electronic device manufacturing method

2016 
This upper layer film forming composition forms an upper layer film by being coated on a resist film which is formed using actinic ray-sensitive or radiation-sensitive resin composition, and contains a resin X and a compound A having a radical trapping group. This pattern forming method involves a step a for forming a resist film by coating an actinic ray-sensitive or radiation-sensitive resin composition onto a substrate, a step b for forming an upper layer film on the resist film by a coating the resist film with the aforementioned upper layer film forming composition, a step c for exposing the resist film on which the upper layer film was formed, and a step d for forming a pattern by developing the exposed resist film using a developing solution that contains an organic solvent.
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