Characterization of semiconductor device structures by modulation spectroscopy

This paper reviews the use of modulation spectroscopy for the characterization of a wide variety of semiconductor device structures. Some systems that will be discussed include pseudomorphic GaAlAs/InGaAs/GaAs modulation-doped quantum-well high-electron-mobility transistors (including the 300K determination of the 2D electron gas density), GaAlAs/GaAs, InP/InGaAs, InGaP/GaAs, InAlAs/InGaAs, and InGaAs/GaAs heterojunction bipolar transistors (including the determination of the built-in fields/doping levels in the emitter and collector regions), GaAs/GaAlAs quantum well IR detectors, quantum well lasers, etc. Particular attention will be paid to nondestructive, contactless techniques such as photoreflectance and contactless electroreflectance that can be performed on entire wafers.© (1994) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.