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Effect of competing trapping centers (sinks) on the evolution of implanted-nitrogen distribution in silicon--a numerical simulation
Effect of competing trapping centers (sinks) on the evolution of implanted-nitrogen distribution in silicon--a numerical simulation
1996
Grigorii Gadiyak
G. A. Kachurin
I.E. Tyschenko
Keywords:
Nitrogen
Chemistry
Atomic physics
Computer simulation
Silicon
Correction
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