A self-clocked ASIC interface for MEMS gyroscope with 1m°/s/√Hz noise floor

An interface for MEMS gyroscope is implemented in 0.18µm HVCMOS technology, and achieves a low noise floor of 1m°/sec/√Hz over 200Hz BW. Electromechanical ΣΔ force-feedback and self-clocking scheme based on gyro resonance are implemented. The interface includes on-chip reference generation, decimation, and temperature compensation.