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Fabrication of high performance RF-MEMS structures on surface planarised LTCC substrates
Fabrication of high performance RF-MEMS structures on surface planarised LTCC substrates
2007
Massimiliano Dispenza
Roberta Buttiglione
Anna Maria Fiorello
Jarkko Tuominen
Kari Kautio
Ollila Jyrki
Pentti Korhonen
Manu Lahdes
Daniele Pochesci
Kari Rönkä
S. Catoni
Romolo Marcelli
Vittorio Foglietti
E. Cianci
A. Coppa
Keywords:
Microelectromechanical systems
Fabrication
Polishing
Optoelectronics
Thin film
True time delay
Materials science
Correction
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