Toluene Gas Sensing Properties of Pt-Nanoparticle-Decorated Indium Oxide Nanofibers on a Low-Power Consumable Bridge-Type Micro-Platform

Pt-decorated In2O3 nanofibers with tailored size and morphology were synthesized as sensing materials for a highly sensitive toluene gas sensor. The bridge-type micro-platforms, including micro-heaters and micro-electrodes for the integration of In2O3 nanofibers-based sensing materials, were designed to demonstrate the sensing at high temperature with low power consumption. The gas sensing properties of the fabricated toluene gas sensor were systematically investigated by controlling the power of the micro-heater and the concentration of the toluene gas. Additionally, the enhanced sensing properties for various gas concentrations of toluene were investigated for Pt-nanoparticle-decorated In2O3 nanofibers.