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閘極介電層HfON摻雜金屬(Ti/Ta/Al)及界面層金氧半元件之電特性改善
閘極介電層HfON摻雜金屬(Ti/Ta/Al)及界面層金氧半元件之電特性改善
2006
gaoxianyan
Hsien-Yen Kao
Tzu-Chen Wang
Kuei-Shu Chang-Liao
Keywords:
Dielectric
Materials science
Inorganic chemistry
Analytical chemistry
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