Application of the Ion Beam Graft Polymerization Method to the Thin Film Diagnosis

Abstract The ion beam graft polymerization (IBGP) method was applied to diagnosis of thin film of several tens μm or less thickness. After a sample stacked on polyethylene film was irradiated with proton beam, polyethylene was graft-polymerized with acrylic acid monomer. From observation of the graft-polymerized polyethylene, information inside the sample are obtained. Demonstrations of the diagnosis method were conducted for a leaf sample and a polyvinyl acetate film contained some voids. Using imitation samples made of metal and polymer sheets, some characteristics of this method was obtained. This method is useful for diagnosis for voids in thin film.