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Evaluation of the Selective Tungsten Deposition Process for VLSI Circuit Applications
Evaluation of the Selective Tungsten Deposition Process for VLSI Circuit Applications
1988
Ph. Lami
Y. Pauleau
Keywords:
Chemistry
Inorganic chemistry
Very-large-scale integration
Metallizing
Tungsten
Electrical connection
Nanotechnology
Electrical engineering
Depot
deposition process
Deposition (law)
Correction
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